Product Details

Product Details
Product Details


A high-performance micro-valve ideal for handling gas analysis and control equipment, fluid precision control, etc. Micro flow rates can be adjusted with high resolution and reproducibility.

■Wide adjustable range
The adjustable flow rate range that can be accommodated is selectable from a minimum of 5 SCCM up to 6000 SCCM.

■High stability
The needle uses linear motion for high reproducibility and no hysteresis.
There will be no fluctuations in the valve opening even if there are sudden pressure fluctuations or vibrations.

■Maintenance management
The needle and orifice body have full compatibility for easy maintenance.
No grease, etc. is used whatsoever.