■Wide adjustable range
The adjustable flow rate range that can be accommodated is selectable from a minimum of 5 SCCM up to 6000 SCCM.
The needle uses linear motion for high reproducibility and no hysteresis.
There will be no fluctuations in the valve opening even if there are sudden pressure fluctuations or vibrations.
The needle and orifice body have full compatibility for easy maintenance.
No grease, etc. is used whatsoever.