■Improvement of soaking characteristics
Stable temperature control and soaking lengths can be made possible by combining heaters suited to the working temperature with our own high-performance controllers.
■Compatible with 100 to 200 mm wafers
The diffusion furnace system can accommodate customer requirements from φ100 mm to φ200 mm.
■Easy maintainability
The structure allows thermocouples or heaters to be replaced safely even while other heaters are increasing in temperature.
■Cost performance
Low cost has been achieved by carefully selecting the parts used and developing waste-free structures.
■Suitable for refurbishment
The external dimensions have been minimized to be suitable for the refurbishment of older systems with limited space.
| Wafer size | Up to φ200 mm | Up to φ150 mm | Up to φ125 mm | Up to φ100 mm |
|---|---|---|---|---|
| Furnace unit dimensions | W 2650mm× D 1200mm× H 2580mm | W 2300mm× D 850mm× H 2395mm | W 2180mm× D 850mm× H 2395mm | W 1850mm× D 700mm× H 2150mm |
| Soak length | 900mm±1.0℃ （No.GAS） | 900mm±1.0℃ （No.GAS） | 800mm±1.0℃ （No.GAS） | 800mm±1.0℃ （No.GAS） |
| Temperature range | 600～1200℃ | 600～1200℃ | 600～1200℃ | 600～1200℃ |
| Temperature control | 3-zone independent control | 3-zone independent control | 3-zone independent control | 3-zone independent control |
| Transport systems (option) | Soft loader Boat elevator soft loader | Soft loader Boat elevator Boat loader | Soft loader Boat elevator Boat loader | Boat loader |
Phone Inquiries
Product Pricing and Delivery Inquiries:
Hours: 9:30～17:00
